PFC Abatement  [ Return towards  Equipment  ]

• High PFC Abatement Efficiency

99.5 % for most PFCs even at high flow rates
Atmospheric pressure plasma : broad impedance matching characteristics and process changes or fluctuations insensitivity ; Excellent tuning characteristics (gas residence time/plasma column length-power)
Non equilibrium chemistry plasma optimization to allow an efficient PFC destruction without typical undesirable high temperature reaction products like NOx etc ...

• Low Cost of Ownership

Minimal utilities requirements : electricity and air
No Fuel or Catalyst Requirements
Low maintenance : excellent reliability of dielectric discharge tube and dielectric cooling fluid
Re-usable cooling water

• Seamless Integration

Small Foot Print
Post Pump System : no interference with the process (during operation and/or maintenance) ; High overall reliability : no risk to the turbo-pump and no corrosive by-products through the dry pump
Low pressure drop (less than 30 mbar - 100 slm) : no impact on tool pumping system
By-Pass System : direct flow from dry pump to exhaust collector if necessary (pump maintenance etc.)

• Modular Design

Up to 120 slm (total flow rate)
Multi plasma tubes design to abate more PFCs as option



To get the technical specifications of this equipment, please use our More Information form.