Equipment [ Return towards Semiconductors]

Application of gases in your activity involves the following equipments, optimized by Air Liquide and its partners.

PFC abatement

A Universal Plasma Abatement System for point-of-use treatment of your etch processes ... the best green tool to destroy PFCs to environmental friendly levels. Application Fields : SF6, C4F8, CHF3, C3F8, C2F6, NF3, CF4, etc ...

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CANDI System : Advanced Precursors

The CANDI system is designed for easy operation and maintenance, with an advanced controller which ensures fully automated process management.

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Gas Cabinets Advanced Principles

To comply with your specifications in terms of gas quality, reliability and safety, AIR LIQUIDE offers a complete line of gas cabinets, FabStream™.

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Chemicals Equipment

High Flow Rate for High Purity Corrosives and Solvents

To meet your high purity and high flow rate requirements for corrosives and solvents at point-of-use, AIR LIQUIDE recommends FabChem™ BCDS-PG, using a proprietary Pressure Gradient technology which distributes the chemicals by nitrogen pressure.

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