CANDI System : Advanced Precursors  [ Return towards  Equipment  ]

Specific safety commitments have been included to keep the operator safe and guarantee the integrity of the installation.The CANDI system is fully equipped with an abundance of safety features using the latest technologies : redundant leak sensors, pressure switches, open door detection, gas detection and sprinklers (both optional features), and more.Fully compliant with international regulations, the CANDI system is SEMI S2 certified and CEM tested by a third party, as well as CE marked.Maintenance is quicker with all components easily accessible from the front door. To make things even simpler, standard maintenance operations are programmed in the PLC and initiated via the Touch Screen.A well-designed enclosure customized to your requirements

Innovative Distribution Technology

AIR LIQUIDE's innovative distribution technology makes the equipment the preferred choice for system performance.Specific highly advanced features have been implemented to guarantee chemical quality at the outlet of the CANDI system.

Helium-pressurized distribution technology is used to feed the chemicals to production lines and also to fill the day tank from the shuttle drum. Because distribution is not interrupted when the shuttle drum is changed, the dispense pressure remains constant regardless of the liquid consumption rate.

Within the system's sophisticated purging system, the liquid to be purged is vaporized by pulling a vacuum lower than its vapor pressure. More efficient vaporization is achieved by heating the shuttle drum manifold. Before and after each shuttle drum change, pressure and vacuum cycles are run, ensuring safe operation and no contamination addition.

Options are available such as the Degas Module, used in the removal of dissolved He in liquid precursors.

• Highly Reliable Liquid Supply

Using advanced process controls, the equipment is designed to give priority to chemical distribution with a total guarantee of required process parameters.

High uptime is achieved for the distribution of liquid chemicals. Extensive instrumentation, along with precise PLC configuration, allow the CANDI to operate under back-up modes.

Fully automated process management minimizes bubbles and controls liquid level and supply pressure. This process is used extensively on liquid chemicals such as TEOS, TEB, TEPO, and TiCl4.

• A Solution for High Consumption : the Bulk CANDI System

To meet your high flow chemical requirements at point of use, AIR LIQUIDE recommends its Bulk CANDI system.

With our patented pressure gradient distribution technology, the Bulk CANDI feeds the chemicals to production lines from small pressurized vessels mounted in the dispense unit. These vessels are alternatively filled from the pressurized day tank. This specific configuration allows several automatic degraded modes while having a low volume of chemical under pressure.

Our advanced distribution technology also has its own built-in expert system, which diagnoses component failures and initiates automatic back-up modes. As a result, the Bulk CANDI system can supply up to 40 tools at optimal uptime.