Chemicals Equipment  [ Return towards  Equipment  ]

This safe and proven concept is easy to maintain and has been used extensively on many different chemicals, including viscous acids and developers. Using the built-in Intelligent Diagnostic system, our advanced chemical distribution equipment offers total reliability by diagnosing component failures and initiating automatic backup modes. As a result, FabChem™ BCDS-PG guarantees optimal uptime of more than 99.9%.

• Medium & Low Flow-Rate for Medium Purity Grade Chemicals

For these requirements, AIR LIQUIDE proposes two technologies :

FabChem™ BCDS-DT based on a pressurized Day Tank with nitrogen for the distribution
FabChem™ BCDS-PU, which uses a PUmp design
Both of these cost effective systems offer excellent reliability.

• Slurry Distribution

To meet your pressure and flow rate needs for all slurry types (oxide, tungsten, copper, etc), AIR LIQUIDE has developed FabChem™ CMP, a flexible and modular product line that includes pressure gradient distribution technology. Combined with our patented design distribution loop, this innovative solution ensures a steady, consistent flow to each point-of-use. The metrology module of the distribution equipment measures the density, pH, and/or the particle distribution of the slurry. In addition, the H2O2 assay is monitored and adjusted as required.

• Dilution for Corrosives

To help you reduce the cost of ownership on diluted chemical distribution, AIR LIQUIDE offers FabChem™ DIL. Batch system dilution is recommended for low volumes, while a continuous dilute blending approach is preferred for high volume requirements. Both technologies ensure proper concentrations and produce very precise blends. Innovative software technology and online conductivity analysis result in accurate concentration control.