Gas Cabinets Advanced Principles  [ Return towards  Equipment  ]

These state of the art systems are modular, ensuring a high degree of flexibility for ease in maintenance, operation, and upgradability of the units.The FabStream™ product line was designed with efficient line utilization in mind and includes two advanced types of gas panels FabStream™ RPV (Reduced Purge Volume) and FabStream™ MPV (Medium Purge Volume). The controller with touch-screen operator interface ensures a continuous gas supply and maintains gas quality by initiating precise purge cycles. It also manages all safety functions to maintain a safe distribution system. 

... also for Liquified Gases

For optimized distribution of Liquefied gases, AIR LIQUIDE recommends the FabStream™ AVP (All Vapour Phase) gas cabinets. This proprietary technology is designed for high volume specialty gas vapor delivery with particular emphasis on increased uptime, sustained process gas purity, and reduced cost of ownership. The equipment's auto-switching capability ensures uninterrupted process gas supply to the tool.

The FabStream™ AVP controller continuously monitors process parameters to ensure a distribution in gas phase. In addition, the controller initiates automatic purging of process gas equipment and lines.

• Optimized Component Panels

For basic specialty gas distribution solutions, AIR LIQUIDE proposes FabStream™ OCP (Optimized Component Panels) gas cabinets with simplified panel design and control systems.

This cost effective system's micro-controller supervises all safety actions and integrates auto-switch function and simple automatic purge sequences required for safe cylinder changes.

High Flow Rate & High Reliability

For Process gases, like HCl, Silane, N2O, etc., with high flow rate
requirements, AIR LIQUIDE recommends the FabStream™ Bulk Delivery System. This solution is an efficient alternative to classical gas cabinets and provides some significant cost-of-ownership benefits including :

• Reduction of capital expenditures
• Increase in reliability and safety through reduced cylinder changes and redundancy of critical components
• Fewer maintenance operations