PFC abatement [ Return towards Equipment ]
• High PFC Abatement Efficiency 
• 99.5 % for most PFCs even at high flow rates
• Atmospheric pressure plasma : broad impedance matching characteristics and process changes or fluctuations insensitivity ; Excellent tuning characteristics (gas residence time/plasma column length-power)
• Non equilibrium chemistry plasma optimization to allow an efficient PFC destruction without typical undesirable high temperature reaction products like NOx etc ...
• Low Cost of Ownership
• Minimal utilities requirements : electricity and air
• No Fuel or Catalyst Requirements
• Low maintenance : excellent reliability of dielectric discharge tube and dielectric cooling fluid
• Re-usable cooling water
• Seamless Integration
• Small Foot Print
• Post Pump System : no interference with the process (during operation and/or maintenance) ; High overall reliability : no risk to the turbo-pump and no corrosive by-products through the dry pump
• Low pressure drop (less than 30 mbar - 100 slm) : no impact on tool pumping system
• By-Pass System : direct flow from dry pump to exhaust collector if necessary (pump maintenance etc.)
• Modular Design
• Up to 120 slm (total flow rate)
• Multi plasma tubes design to abate more PFCs as option
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