ALOHA™ Advanced Precursors  [ Return towards  Semiconductors  ]

The ALOHA product line includes all the advanced CVD and ALD precursors for sub-130 nm, with capabilities ranging from ton-level of low-k materials down to few grams of sub-45 nm R&D products.

ALOHA’s precursors come in a comprehensive package including dedicated, OEM-qualified delivery systems, ultra-high purity canisters, and extremely tight specifications, backed by its world class Air Liquide-BALAZS analytical expertise.