Dresden: Ultra-pure gas complex in Germany 

A major investment in Silicon Saxony to support the European semiconductor industry

As part of a long-term contract with a major semiconductor player, Air Liquide is building new ultra-pure gas production units in the heart of Silicon Saxony in Germany. Valued at over 250 million euros, this is the Group’s largest investment to support Europe's semiconductor industry, thereby reinforcing its leadership on the continent.

The project in brief

  • Investment announcement

  • Construction of infrastructure begins

  • Planned operational commissioning

A state-of-the-art industrial infrastructure for Silicon Saxony

To meet the ultra-high purity requirements and the growing needs of the semiconductor market, Air Liquide teams will build and operate new, state-of-the-art industrial gas production units, which are scheduled to be commissioned in 2027. The complex will include:

  • 3 Air Separation Units (ASUs) to produce nitrogen and argon to maintain an inert manufacturing environment, as well as oxygen, which is essential for creating protective insulating layers on the silicon wafer.
  • 2 hydrogen production units, used to stabilize the electrical properties of the chips and to purify advanced equipment.
  • Associated infrastructure.

These facilities will guarantee a continuous, stable, and reliable supply of essential gases required to operate the customer’s new fab. By leveraging modularization, standardization, and digital technologies, Air Liquide ensures exceptionally high performance and quality standards for its partner.

Industrial performance and European sovereignty

Located at the heart of a major European semiconductor manufacturing hub, the new fab will produce 40,000 300 mm wafers per month. This large-scale project aligns perfectly with the European Union's strategic autonomy ambitions. It directly supports Europe's goal to double its semiconductor market share to reach 20% of global capacity by 2030, thereby strengthening the continent's technological sovereignty.

The new ultra-pure gas complex significantly reinforces Air Liquide's position as a partner of choice for the semiconductor industry, both in Europe and globally. It demonstrates the Group's expertise in supplying large volumes of ultra-pure gases in compliance with the highest standards of reliability and quality.

  • Over €250 million invested by Air Liquide

  • 3 Air Separation Units (ASUs)

  • 2 Hydrogen Production Units

  • Europe accounts for approximately 10%

    of global semiconductor manufacturing capacity1

Reducing carbon emissions at the heart of the project

Through large-scale local production, Air Liquide accompanies its customer’s ramp-up in semiconductor manufacturing, while supporting their decarbonization targets. This project integrates two major levers to reduce the carbon footprint of the fab: 

  • Decarbonized logistics: By producing the majority of the gases directly on-site, the facility will drastically limit truck transportation and its associated emissions.
  • Clean energy: 100% of the electricity used to power all facilities is expected to come from renewable sources.

By combining geographical proximity, technological expertise, and long-term contractual commitments, Air Liquide consolidates its leadership in the electronics market—a key growth driver for the future.

Our vision is that innovation and sustainable development are complementary. In this way, we are helping our customers develop the technologies of the future while controlling their own environmental impact.

Lorenzo Castrogiovanni

Electronics Europe Vice President at Air Liquide

Air Liquide’s role in the manufacturing of semiconductors

Discover how Air Liquide’s advanced materials shape the circuits of our connected devices with absolute integrity.

1 Semiconductors: MEPs adopt legislation to boost EU chips industry, europarl.europa.eu

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